PVD真空镀膜需要注意?-行业资讯-杭州中岳钛金有限公司

目前PVD主要有蒸发镀膜,磁控溅射镀膜,多弧离子镀膜,化学气相沉积等形式。

PVD总的来说属于产业,和其他行业相比,对人体有害很小,但不是没有。当然,也完全可以有效减少,甚至完全消除。以下是需要注意的:

噪音污染,如特别是一些大的镀膜设备,机械真空泵噪音很大,可以把泵隔离在墙外;

光污染离子镀膜过程中,气体电离发出强光,不宜透过观察窗久看;

金属污染,镀膜材料有些(如铬、铟、铝)是对人体有害的,特别要注意真空室清理过程中出现的粉尘污染;

辐射,有些镀膜要用到射频电源,如功率大,需做好屏蔽处理。另外,欧洲标准在单室镀膜机门框四周嵌装金属线屏蔽辐射。

At present, PVD mainly includes evaporation coating, magnetron sputtering coating, multi arc ion coating, chemical vapor deposition and so on.

Generally speaking, PVD belongs to green environmental protection industry. Compared with other industries, it is very harmful to human body, but it is not without. Of course, it can also be effectively reduced or even completely eliminated. The following points need attention:

Noise pollution, such as some large coating equipment and mechanical vacuum pump, which are very noisy, can isolate the pump outside the wall;

In the process of light pollution ion coating, the gas ionizes and emits strong light, which is not suitable to look through the observation window for a long time;

Metal pollution. Some coating materials (such as chromium, indium and aluminum) are harmful to human body. Special attention should be paid to the dust pollution during the cleaning of the vacuum chamber;

Radiation, some coatings need to use RF power supply. If the power is high, it needs to be shielded. In addition, according to European standards, metal wires are embedded around the door frame of single room coating machine to shield radiation.

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